Master of Science in Micro

Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures. The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications. Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques. The programme comprises the following foci: Nanotechnology, nanoelectronics, and nanosensors Materials for microtechnologies and nanotechnologies Technologies of microstructuring and nanostructuring Structure and material characterisation Semiconductors Microsystems technology / system integration Microelectronic packaging and assembly Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies. Students will be involved in research projects from an early stage. They have the opportunity to gain hands-on experience in the modern laboratory space (used as clean rooms in different classes) available in two technology buildings.